Chemflow-PE

Chemically-resistant cartridge for bulk and lower temperature applications

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Description

The Chemflow-PE filter cartridge uses a PTFE membrane along with HDPE supports that provide an economical alternative to all-fluoropolymer cartridges. It provides a high degree of retention and cleanliness along with good flow and lifetime. This filter is ideally suited for bulk chemical delivery and lower temperature wet processes (<60°C). It is available dry or wet-packed for quick installation.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Good flow rates
• Long lifetime
• Wet-pack option for quick installation
• PTFE/ HDPE construction for chemical resistance
• 100% integrity tested in cleanroom environment

Applications
• Bulk chemical delivery
– Acids, bases, solvents, photochemicals
– Wet etch and clean (< 60°C)
– Phosphoric acid
– Hydrofluoric acid
– Nitric acid
– SC1,SC2
– Solvents