Polyflow-CMP

All-polypropylene nominal-rated depth cartridges for CMP slurry filtration

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Description

Polyflow-CMP depth cartridges have been developed to reduce post-CMP defectively by removing undesirable large particles and gels from a wide variety of CMP slurries. Its high dirt-loading, random-fiber depth media provides consistent particle retention in ratings from 0.2 μm to 30 μm without removing a significant amount of smaller ‘working particles’.

The cartridges are thermally bonded from 100% virgin polypropylene to ensure low extractables and chemical compatibility with both acidic and alkaline slurries.

Configurations are available in lengths from 5″ to 40″ with 10 fitting options. The specially-designed depth media maximizes flow rate and service life to reduce downtime associated with
change-outs.

Additional information

Markets

Semiconductor

Materials

Polypropylene

Retention Ratings

Nominal

Features

Benefits
• Removes undesirable large particles while retaining working slurry particles
• Chemically compatible with both acidic and alkaline slurries
• High flow rate and long service life reduce system downtime
• Superior particle retention protects downstream filters and reduces overall filtration costs

Applications
• Colloidal silica CMP slurry
• POU, distribution loop and supply
– Oxide
– Copper
– Polysilicon