Proflow II-E

Chemically-resistant cartridge for ultrapure fluids

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Description

The Proflow II-E filter cartridge uses a PTFE membrane along with high purity polypropylene supports that provide an economical alternative to all-fluoropolymer cartridges. It provides a high degree of retention and cleanliness along with good flow and lifetime. This filter is ideally suited for ultrapure microelectronics fluids. The hydrophobic PTFE membrane can be used as a highly efficient barrier to relieve gas and prevent tank pressure build-up from outgassing chemicals. It is available dry or wet-packed for quick installation and lower extractables.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Good liquid flow rates
• Wet-pack option for quick installation
• PTFE/ PP construction for chemical resistance
• Wide variety of configurations and ratings
• 100% integrity tested in cleanroom environment

Applications
• Bulk chemical manufacturing and delivery
– Acids, bases, solvents, photochemicals
• Wet etch and clean
– Dilute acids
– DI water (<80°C)
• Gas venting for tank pressure relief