Chemflow-XF

Highest-flowing cartridge for bulk and lower temperature chemical applications

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Description

The Chemflow-XF filter cartridge uses a superior asymmetric PTFE membrane which provides unmatched flow rates and on-stream life. It is constructed with HDPE supports providing an economical alternative to all-fluoropolymer cartridges while still maintaining a high degree of retention and cleanliness. This filter is ideally suited for bulk chemical delivery and lower temperature wet processes (<60°C). Customers using the cartridge for viscous fluids like phosphoric acid, have reported flow rates and lifetimes more than twice that of the leading competitor. These advantages help improve yields while decreasing overall filtration costs. In bulk delivery applications, the high flow allows for reduced system sizing and associated savings. It is available dry or wet-packed for quick installation.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Highest flow rates in the industry
• Long lifetime
• Wet-pack option for quick installation
• PTFE/HDPE construction for chemical resistance
• 100% integrity tested in cleanroom environment

Applications
• Bulk chemical delivery
– Acids, bases, solvents, photochemicals
• Wet etch and clean (< 60°C)
– Phosphoric acid
– Hydrofluoric acid
– Nitric acid
– SC1,SC2
– Solvents