Fluorocap-SELECT

High performance all-fluoropolymer capsule for the most aggressive applications

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Description

The Fluorocap-SELECT encapsulated filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating that increases filtration area and flow by over 25% compared to our standard Fluorocap. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change­outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits

• Large filtration area for longer life
• High flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications

• Wet etch and clean
– Hot phosphoric acid
– Sulfuric acid
– Hydrofluoric acid
– Nitric acid
– Piranha
– SC1,SC2
– NMP-based solvents
• Other high temperature or ozonated processes