Fluorocap-XL

Highest-performance all-fluoropolymer capsule for the most aggressive applications

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Description

The Fluorocap-XL encapsulated filter cartridge is setting the new standard for exceptional flow rates and onstream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases filtration area by over 70%. This results in increased bath turnover and longer filter life to meet the demands of today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Extra large filtration area for longer life
• Highest flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hot phosphoric acid
– Sulfuric acid
– Hydrofl uoric acid
– Nitric acid
– Piranha
– SC1, SC2
– NMP-based solvents
• Other high temperature or ozonated processes