Fluoroflow

Economical all-fluoropolymer cartridge for filtration of aggressive chemicals

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Description

The Fluoroflow filter cartridge is an economical all-fluoropolymer product for wet etch and clean processes as well as certain high-purity chemical production applications. It provides good flow rates and on-stream life at an economical cost. The all fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150°C. It is available either ozone DI flushed and dried or wet-packed for quick installation.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Economical
• Wet-pack option for quick installation
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hydrofluoric acid
– Hydrochloric acid
– SC1,SC2
• Other high temperature or ozonated processes
• High-purity chemical and solvent manufacturing
• High-purity chemical distribution