Fluoroflow-HSA

Increased performance all-fluoropolymer cartridge for aggressive applications

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Description

The Fluoroflow-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Increased filtration area for longer life
• Higher flow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fluoropolymer for most maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hydrofluoric acid
– Piranha/SPM
– SC1,SC2
– Solvent based photoresist cleans
• Other high temperature or ozonated processes
• High-purity chemical and solvent manufacturing
• High-purity chemical and solvent distribution