Fluoroflow-SELECT

High performance all-fluoropolymer cartridge for aggressive applications

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Description

The Fluoroflow-SELECT filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating technology that increases filtration area and flow rate by over 70% versus our standard Fluoroflow. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers ultra-low metal extractables.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Large filtration area for longer life
• High flow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hydrofluoric acid
– Piranha/SPM
– SC1,SC2
– Aggressive solvent based resist strips
• Other high temperature or ozonated processes
• High-purity chemical manufacturing
• High-purity chemical distribution