Fluoroflow-XF

High-flow all-fluoropolymer cartridge for aggressive and ultra-high purity chemical applications

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Description

The Fluoroflow-XF filter cartridge uses a superior high-flux asymmetric PTFE membrane which provides unmatched flow rates and on-stream life. Customers using the cartridge for viscous fluids like phosphoric acid, have reported flow rates and lifetimes more than twice that of the leading competitor. The benefits of increased bath turnover and longer life are improved process performance and lower filtration costs. In addition, the all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150 °C. Available dry, or wet-packed for quick installation. Our Ultraclean wet-packed option offers the lowest metals extractables in the industry

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Highest flow rates in the industry
• Longest lifetime
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hydrochloric acid
– Hydrofluoric acid
– Piranha/SPM
– SC1,SC2
– NMP-based solvents
– Aggressive solvent based resist strip chemistries
• Other high temperature or ozonated processes
• Silicone wafer manufacturing
– Trichorosilane (liquid or vapor)
• High-purity chemical manufacturing
• High-purity chemical distribution