Fluoroflow-XL

Highest-performance all-fluoropolymer cartridge for aggressive applications

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Description

The Fluoroflow-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter cartridge (3.25˝) combined with our unique SELECT pleating technology that increases filtration area and flow rate. This results in increased bath turnover and longer filter lifetime demanded by today’s advanced wafer fabs. The all-fluoropolymer construction provides excellent chemical resistance and superior cleanliness for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers ultra-low metal extractables.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Extra large filtration area for longer life
• Highest flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for ultra-low metal extractables
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications
• Wet etch and clean
– Hydrofluoric acid
– SC1,SC2
– NMP-based solvents
• Aggressive solvent based photoresist cleans
• High-purity chemical and solvent manufacturing
• Other high temperature or ozonated processes