Proflow II-E Mini-Capsule

Small-volume capsule for ultrapure fluids and gases

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Description

The Proflow II-E mini-capsule uses a PTFE membrane along with high purity polypropylene supports that provide an economical alternative to all-fluoropolymer cartridges. It provides a high degree of retention and cleanliness along with good flow and lifetime. This filter is ideally suited for ultrapure microelectronics fluids and gases. The hydrophobic PTFE membrane serves as a highly efficient barrier to insure low moisture content of gases. Fast and easy change-outs are assured with the encapsulated design. Three sizes are available to match the application and minimize hold-up volume.

Additional information

Markets

Semiconductor

Materials

PTFE

Retention Ratings

Absolute

Features

Benefits
• Good liquid and gas flow rates
• PTFE/PP construction for chemical resistance
• Fast and easy change-out
• Three capsule sizes
• 100% integrity tested

Applications
• Wet etch and clean
– Dilute acids
– DI water (<80°C)
• Ultrapure electronics-grade gases
• Small-volume lab systems